WORKSHOP PAPER
Silicon Metalenses towards a fully integrated SWIR sensing
Abstract
This paper discusses the design and application of Silicon Metalenses for short wave infrared (SWIR) sensing technologies. It highlights the use of Silicon-Germanium sensors for advancing SWIR sensor technologies, which offers higher eye safety and allows for groundbreaking sensor designs due to SWIR's ability to move the wavelength above the retinal hazard area. The paper details the design of a fully Silicon integrated stacked sensor, leveraging Silicon Metalens flat optics and focusing on multiple use-cases like eye-tracking and wide-angle time of flight (TOF) sensors. Numerical simulations of the optical stack and results from a Silicon metalens prototype at 1550nm are presented.Keywords
Silicon Metalenses, SWIR Sensing Technologies, Silicon-Germanium Sensors,References
1) E. Marti, M. A. de Miguel, F. Garcia and J. Perez, "A Review of Sensor Technologies for Perception in Automated Driving", IEEE Intelligent Transportation Systems Magazine, 2019. https://doi.org/10.1109/mits.2019.2907630
2) Nicolas Pinchon et al., "All weather vision for automotive safety: which spectral band?", AMAA 2018, Advanced Microsystems for Automotive Applications, 2018. https://doi.org/10.1007/978-3-319-99762-9_1
3) N. Na et al., "High-Performance Germanium-an-Silicon Lock-in Pixels for Indirect Time-of-Flight Applications", 2018 IEEE International Electron Devices Meeting (IEDM), 2018. https://doi.org/10.1109/iedm.2018.8614707
4) , "laser safety", ohsonline.com/articles/2014/08/01/laser-safety_0.aspx
5) B. C. Hseih et al., "A 3D Stacked Programmable Image Processing Engine in a 40nm Logic Process with a Detector Array in a 45nm CMOS Image Sensor Technologies", International Image Sensor Workshop, 2017. https://doi.org/10.60928/2msh-t9wl
6) Jorge Gomez and al., "Distributed On-Sensor Compute System for AR/VR Devices: A Semi-Analytical Simulation Framework for Power Estimation", 2022 tinyML Research Symposium, 2022
7) A. Arbabi et al., "Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations", Nature Communications, 2016. https://doi.org/10.1038/ncomms13682
8) M Shalaginov et al., "Single-Element Diffraction-Limited Fisheye Metalens", Nano Letters, 2020. https://doi.org/10.1021/acs.nanolett.0c02783.s001
9) Engelberg J, et al., "Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications", Nanophotonics, 2020. https://doi.org/10.1515/nanoph-2019-0177