WORKSHOP PAPER
A 0.5μm pixel-pitch 200-Megapixel CMOS Image Sensor with Partially Removed Front Deep Trench Isolation for Enhanced Noise Performance and Sensitivity
Minkyung Kim1, DongHyun Kim1, Kyoung eun Chang1, Kieyoung Woo1, Kisang Yoon1, Hyunki Ko1, Junoh Kim1, Kwansik Cho2, Ho-Chul Ji2, Sung-In Kim2, Jungbin Yun1, Bumsuk Kim1, Kyungho Lee1, Jesuk Lee1
1System LSI Division, Samsung Electronics Co., Hwasung-City, Gyunggi-do, 18848, Republic of Korea
2Semiconductor R&D Center, Samsung Electronics Co., Hwasung-City, Gyunggi-do, 18848, Republic of Korea

Abstract

A high-resolution CMOS image sensor is essential in the mobile imaging industry, as a high pixel count enables the capture of finer details and ensures superior image quality under various zoom conditions. Front deep trench isolation (FDTI) technology is a promising solution for achieving this, as it allows submicron-sized pixels to maintain high full-well capacity (FWC) and a high dynamic range (HDR). This paper presents a 200-megapixel (Mp) CMOS image sensor featuring a 0.5μm unit pixel size in the quad-cell (Q-cell) FDTI structure. The structure includes various technologies that enhance FWC, temporal noise (TN), and sensitivity performance.
Year: 2025
Workshop: IISW
URL: https://doi.org/10.60928/21fa-6izm

Keywords

CMOS, image sensor, pixel-pitch, 200-Megapixel, Front Deep Trench Isolation, noise performance, sensitivity,

References

[1]) Kim, DongHyun, et al., "6.10 A 1/1.56-inch 50Mpixel CMOS Image Sensor with 0.5 μm pitch Quad Photodiode Separated by Front Deep Trench Isolation", 2024 IEEE International Solid-State Circuits Conference (ISSCC), 2024. https://doi.org/10.1109/isscc49657.2024.10454448
[2]) Choi, Sungsoo, et al., "World smallest 200Mp CMOS image sensor with 0.56 μm pixel equipped with novel deep trench isolation structure for better sensitivity and higher CG", Proceedings of the Int’l Image Sensor Workshop (IISW), Crieff, UK, 2023
[3]) Lee, Junsik, et al., "0.6 μm F-DTI based quad-cell with advanced optic technology for all-pixel PDAF and high sensitivity/SNR performance", Proceedings of the Int’l Image Sensor Workshop (IISW), 2023
[4]) Kim, Hyuncheol, et al., "A 0.64 μm 4-photodiode 1.28 μm 50Mpixel CMOS image sensor with 0.98 e-temporal noise and 20Ke-full-well capacity employing quarter-ring source-follower", 2023 IEEE International Solid-State Circuits Conference (ISSCC), 2023. https://doi.org/10.1109/isscc42615.2023.10067732