WORKSHOP PAPER
Over 100 Million Frames per Second 368 Frames Global Shutter Burst CMOS Image Sensor with In-pixel Trench Capacitor Memory Array
Manabu Suzuki1, Rihito Kuroda1, Shigetoshi Sugawa1
1Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi, Japan 980-8579

Abstract

In this paper, a prototype ultra-high-speed global shutter CMOS image sensor with in-pixel trench capacitor memory array achieving over 100M frames per second with up to 368 record length by burst CDS operation is demonstrated.
Publisher: IISS (Int. Image Sensors Society)
Year: 2019
Workshop: IISW
URL: https://doi.org/10.60928/77jm-ncwi

Keywords

Ultra-high-speed imaging, Global shutter CMOS sensor, In-pixel trench capacitor memory array,

References

1) M. Versluis, "High-speed imaging in fluids", Experiments in Fluids, 2013. https://doi.org/10.1007/s00348-013-1458-x
2) Y. Tochigi, K. Hanzawa, Y. Kato, R. Kuroda, H. Mutoh et al., "A Global-Shutter CMOS Image Sensor With Readout Speed of 1-Tpixel/s Burst and 780-Mpixel/s Continuous", IEEE J. Solid-State Circuits, 2013. https://doi.org/10.1109/jssc.2012.2219685
3) R. Kuroda, Y. Tochigi, K. Miyauchi, T. Takeda, H. Sugo et al., F. Shao and S. Sugawa, "A 20Mfps Global Shutter CMOS Image Sensor with Improved Light Sensitivity and Power Consumption Performances", ITE Trans. Media Tech. and Applications, 2016. https://doi.org/10.3169/mta.4.149
4) M. Suzuki, M. Suzuki, R. Kuroda, Y. Kumagai, A. Chiba, N. Miura, N. Kuriyama, and S. Sugawa, "An Over 1Mfps Global Shutter CMOS Image Sensor with 480 Frame Storage Using Vertical Analog Memory Integration", IEDM Tech. Dig., 2016. https://doi.org/10.1109/iedm.2016.7838376
5) M. Suzuki, M. Suzuki, R. Kuroda, Y. Kumagai, A. Chiba, N. Miura, N. Kuriyama, and S. Sugawa, "10 Mfps 960 Frames Video Capturing Using a UHS Global Shutter CMOS Image Sensor with High Density Analog Memories", Proc. 2017 Int. Image Sensor workshop, 2017. https://doi.org/10.60928/vxpm-2mig
6) L. Wu, D. San Segundo Bello, P. Coppejans, J. Craninckx, P. Wambacq, J. Borremans, "A 20 Mfps high frame-depth CMOS burst-mode imager with low power in-pixel NMOS-only passive amplifier", Proc. SPIE, 2016. https://doi.org/10.1117/12.2271135
7) M. Suzuki, M. Suzuki, R. Kuroda, and S. Sugawa, "A Preliminary Chip Evaluation toward Over 50Mfps Burst Global Shutter Stacked CMOS Image Sensor", IS&T Int. Symp. On Electronic Imaging, 2018. https://doi.org/10.2352/issn.2470-1173.2018.11.imse-398
8) M. Suzuki, R. Kuroda, and S. Sugawa, "A 125Mfps Global Shutter CMOS Image Sensor with Burst Correlated Double Sampling during Photo-Electrons Collection", Extended Abstracts of 2018 Int. Conf. on Solid State Devices and Materials, 2018. https://doi.org/10.7567/ssdm.2018.j-6-05
9) P. Martin-Gonthier, F. Raymundo, and P. Magnan, "High-density 3D interconnects Technology: The key for burst-mode very high speed imaging?", Proc. 2015 Int. Image Sensor Workshop, 2015. https://doi.org/10.60928/2pgv-k4ke
10) K. Miyauchi, T. Takeda, K. Hanzawa, Y. Tochigi, S. Sakai, R. Kuroda et al., "Pixel Structure with 10 nsec Fully Charge Transfer Time for the 20M Frame Per Second Burst CMOS Image Sensor", Proc. IS&T/SPIE Electronic Imaging, 2014. https://doi.org/10.1117/12.2042373
11) T. G. Etoh, D. Poggemann, A. Ruckelshausen, A. Theuwissen, G. Kreider et al., "A CCD Image Sensor of 1Mframes/s for Continuous Image Capturing of 103 Frames", ISSCC Dig. Tech. Papers, 2002. https://doi.org/10.1109/isscc.2002.992094
12) T. G. Etoh, D. H. Nguyen, S. V. T. Dao, C. L. Vo, M. Tanaka, K. Takehara et al., "A 16 Mfps 165 kpixel backside-illuminated CCD", ISSCC Dig. Tech. Papers, 2011. https://doi.org/10.1109/isscc.2011.5746372
13) J. Crooks, B. Marsh, R. Turchetta, K. Taylor, W. Chan, A. Lahav, A. Fenigstein, "Kirana: a solid-state megapixel uCMOS image sensor for ultra-high speed imaging", Proc. IS&T/SPIE Electronic Imaging, 2013. https://doi.org/10.1117/12.2011762
14) T. G. Etoh, K. Shimonomura, Q. A. Quang, Kosei Takehara, Yoshinari Kamakura, Paul Goetschalckx, Luc Haspeslagh, "A 100 Mfps image sensor for biological applications", SPIE Photonics West 2018, 2018. https://doi.org/10.1117/12.2288861
15) V. Dao et al., "An Image Signal Accumulation Multi-Collection-Gate Image Sensor Operating at 25 Mfps with 32 × 32 Pixels and 1220 In-Pixel Frame Memory", Sensors, 2018. https://doi.org/10.3390/s18093112