WORKSHOP PAPER
Analysis and Reduction of Floating Diffusion Capacitance Components of CMOS Image Sensor for Photon-Countable Sensitivity
Fumiaki Kusuhara1, Shunichi Wakashima1, Satoshi Nasuno1, Rihito Kuroda1, Shigetoshi Sugawa1
1Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi, Japan 980-8579

Abstract

This paper describes an analysis methodology of components of floating diffusion (FD) capacitance (CFD) and proposes CFD reduction methods for photon-countable sensitivity. The analysis confirms that the sum of each CFD component agrees well with the measurement result of CFD in sensor, and its reduction method is effective as demonstrated by the fabricated CMOS image sensor chip exhibiting conversion gain (CG) of 243µV/e- (CFD of 0.66fF).
Publisher: IISS (Int. Image Sensors Society)
Year: 2015
Workshop: IISW
URL: https://doi.org/10.60928/8y7q-9qcq

Keywords

CMOS Image Sensor, CFD Components, Photon-Countable Sensitivity,

References

1) K. Tanioka, et al, "IEEE Electron Device Lett.", IEEE Electron Device Lett., 8, 9, 1987
2) B. Fowler, et al, "International Image Sensor Workshop", International Image Sensor Workshop, 2009
3) Y. Nitta, et al, "Int. Solid-State Circuits Conf., Digest Tech", Int. Solid-State Circuits Conf., Digest Tech, 2006
4) S. Adachi, et al, "Symp. VLSI Circ., Digest Tech", Symp. VLSI Circ., Digest Tech
5) J. Ma, et al, "International Electron Device Meeting", International Electron Device Meeting, 2014
6) J. R. Janesick, "Photon Transfer DN→λ", 2007. https://doi.org/10.1117/3.725073
7) E. Fossum, "International Image Sensor Workshop", International Image Sensor Workshop, 2007
8) S. Wakashima, et al, "Symp. VLSI Circ., Digest Tech", Symp. VLSI Circ., Digest Tech, 2015
9) S. Sugawa, et al, "Int. Solid-State Circuits Conf., Digest Tech", Int. Solid-State Circuits Conf., Digest Tech, 2005