WORKSHOP PAPER
IR Enhanced Global Shutter Pixel for High Speed Applications
Assaf Lahav1, Adi Birman1, Dima Veinger1, Amos Fenigstein1, Dexue Zhang2, Daniel Van Blerkom2
1TowerJazz Semiconductor Ltd, Migdal Haemek, Israel
2Forza Silicon Corp., 2947 Bradley St, Suite 130, Pasadena, California, 91107, USA

Abstract

This paper presents the methods used to enhance the near IR performance of a 3.75µm global shutter pixel. It demonstrates achieving Quantum Efficiency (QE) above 30% at 850nm while maintaining the Modulation Transfer Function (MTF) in the test system above 40 lpm (at 50%). The paper discusses the tradeoff between Quantum Efficiency and the MTF using different epi thickness and resistivity, targeted for automotive and security markets, and tested on silicon for up to 450 fps.
Publisher: IISS (Int. Image Sensors Society)
Year: 2013
Workshop: IISW
URL: https://doi.org/10.60928/9gg8-qj5j
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Keywords

Near Infra Red, CIS, Global Shutter, High Frame Rate, MTF,

References

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