WORKSHOP PAPER
The DUV Stability of Superlattice-doped CMOS Detector Arrays
M. E. Hoenk1, A. G. Carver1, T. Jones1, M. Dickie1, P. Cheng1, F. Greer1, S. Nikzad1, J. Sgro2, S. Tsur3
1Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109
2Alacron, Inc., 71 Spit Brook Rd., Suite 200, Nashua, NH 03060
3Applied Materials Inc., Process, Diagnostics & Control, 9 Oppenheimer St., Rehovot, 76705, Israel

Abstract

Superlattice Doped Detectors - JPL and Alacron have recently developed a high performance, DUV camera with a superlattice doped CMOS imaging detector. Superlattice doped detectors achieve nearly 100% internal quantum efficiency in the deep and far ultraviolet, and a single layer, Al2O3 antireflection coating enables 64% external quantum efficiency at 263nm. In lifetime tests performed at Applied Materials using 263nm pulsed, solid state and 193nm pulsed excimer lasers, the quantum efficiency and dark current of the JPL/Alacron camera remained stable to better than 1% precision during long-term exposure to several billion laser pulses, with no measurable degradation, no blooming, and no image memory at 1000 fps.
Publisher: IISS (Int. Image Sensors Society)
Year: 2013
Workshop: IISW
URL: https://doi.org/10.60928/b43j-xz0o
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Keywords

Superlattice Doped Detectors, DUV Stability, CMOS Detector Arrays,

References

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