WORKSHOP PAPER
Towards Infrared Spectral Extension of CMOS Image Sensors
Kaitlin M. Anagnost1, Xiaoxin Wang1, Jifeng Liu1, Eric R. Fossum1
1Thayer School of Engineering, Dartmouth College, Hanover, NH, USA

Abstract

A new structural integration scheme for p-type infrared (IR) absorbers directly on silicon (Si)-based CMOS image sensors with type-II band alignment is proposed and explored by calculation as an alternative to HgCdTe and other hybridized IR detectors. While HgCdTe is a material of choice for many IR detectors, its challenging manufacturing process and thermal reliability, among other factors, prove detrimental to some applications. Si-based sensors with directly deposited IR absorbing layers may be a suitable alternative. The band structures for the IR absorbing materials Ge0.89Sn0.11 and In0.1Ga0.9Sb on Si are calculated and analyzed. Detector parameters including dark current, target wavelength, quantum efficiency (QE), and others, are also calculated to explore this approach in concert with separate experimental fabrication and measurement.
Publisher: IISS (Int. Image Sensors Society)
Year: 2023
Workshop: IISW
URL: https://doi.org/10.60928/by18-5vod

Keywords

CMOS image sensor, Non-visible, Spectral extension, IR,

References

1) A. Rogalski, "HgCdTe infrared detector material: History, status and outlook", Reports on Progress in Physics, 2005. https://doi.org/10.1088/0034-4885/68/10/r01
2) D. Zhang et al., "High-responsivity GeSn short-wave infrared p-i-n photodetectors", Applied Physics Letters, 2013. https://doi.org/10.1063/1.4801957
3) H. Tran et al., "Si-Based GeSn Photodetectors toward Mid-Infrared Imaging Applications", ACS Photonics, 2019. https://doi.org/10.1021/acsphotonics.9b00845.s001
4) R. Soref, D. Buca, and S.-Q. Yu, "Group IV Photonics: Driving Integrated Optoelectronics", Optics and Photonics News, 2016. https://doi.org/10.1364/opn.27.1.000032
5) X. Wang et al., "GeSn on Insulators (GeSnOI) Toward Mid-infrared Integrated Photonics", Frontiers in Physics, 2019. https://doi.org/10.3389/fphy.2019.00134
6) S. P. Svensson, W. A. Beck, W. L. Sarney, D. Donetsky, S. Suchalkin, and G. Belenky, "Temperature dependent Hall effect in InAsSb with a 0.11 eV 77 K-bandgap", Appl. Phys. Lett., 2019. https://doi.org/10.1063/1.5081120
7) E. H. Steenbergen, C. P. Morath, D. Maestas, G. D. Jenkins, and J. V. Logan, "Comparing II-VI and III-V infrared detectors for space applications", Infrared Technology and Applications XLV, SPIE, 2019. https://doi.org/10.1117/12.2519250
8) R. Pierret, "Semiconductor Device Fundamentals", Addison-Wesley Publishing Company, 1996
9) S. M. Sze and K. K. Ng, "Physics of Semiconductor Devices, 3rd Edition - Simon M. Sze, Kwok K. Ng", Physics of Semiconductor Devices, 3rd Edition.; John Wiley & Sons, Inc.; NJ, 2007
10) Brown and Arnold, "Fundamentals of Laser-Material Interaction and Application to Multiscale Surface Modification", https://spikelab.mycpanel.princeton.edu/papers/book02.pdf, 2010. https://doi.org/10.1007/978-3-642-10523-4_4
11) Solar Energy, "Solar cells —Operating principles, technology and system applications", Solar Energy, 1982. https://doi.org/10.1016/0038-092x(82)90265-1
12) B. Baert, M. Schmeits, and N. D. Nguyen, "Study of the energy distribution of the interface trap density in a GeSn MOS structure by numerical simulation of the electrical characteristics", Applied Surface Science, 2014. https://doi.org/10.1016/j.apsusc.2013.09.022
13) M. Sakhaf and M. Schmeits, "Capacitance and conductance of semiconductor heterojunctions with continuous energy distribution of interface states", Journal of Applied Physics, 1996. https://doi.org/10.1063/1.363750
14) W. Dou, "High-Sn-content GeSn alloy towards Room-temperature Mid Infrared Laser", University of Arkansas, Fayetteville