WORKSHOP PAPER
Energy Harvesting Pixel Array with Deep Trench Isolated Diodes for Self-Powered Imaging
F. Kaklin1,2, J. M. Raynor2, R. K. Henderson1
1School of Engineering, Institute for Integrated Micro and Nano Systems, The University of Edinburgh,
2STMicroelectronics Imaging Division, Edinburgh, UK,

Abstract

An array of pixels with dual functionality is implemented in a deep trench isolation (DTI), backside illuminated (BSI) process. Full thickness isolation separates the diode from the readout and reconfiguration transistors to make a 4T pixel. Each row of the array can operate independently in imaging mode (IM) or energy harvesting (EH) mode, ensuring power generation even when capturing a frame. The theoretical limit for power generation is evaluated based on an idealized lens and realistic illumination levels for different spectra. The presented chip achieves around half of this limit, operating with an efficiency between 9-15%.
Publisher: IISS (Int. Image Sensors Society)
Year: 2019
Workshop: IISW
URL: https://doi.org/10.60928/cc4f-4w45

Keywords

Energy Harvesting, Deep Trench Isolation, Self-Powered Imaging,

References

1) S. U. Ay, "A CMOS energy harvesting and imaging (EHI) active pixel sensor (APS) imager for retinal prosthesis", IEEE Trans. Biomed. Circuits Syst., 2011. https://doi.org/10.1109/tbcas.2011.2170069
2) I. Cevik and S. U. Ay, "A 0.8V 140nW low-noise energy harvesting CMOS APS imager with fully digital readout", Proc. IEEE 2014 Cust. Integr. Circuits Conf. CICC 2014, 2014. https://doi.org/10.1109/cicc.2014.6946128
3) I. Cevik and S. U. Ay, "An Ultra-Low Power Energy Harvesting and Imaging (EHI) Type CMOS APS Imager with Self-Power Capability", IEEE Trans. Circuits Syst. I Regul. Pap., 2015. https://doi.org/10.1109/tcsi.2015.2451892
4) S. Y. Park, K. Lee, H. Song, and E. Yoon, "Simultaneous Imaging and Energy Harvesting in CMOS Image Sensor Pixels", IEEE Electron Device Lett., 2018. https://doi.org/10.1109/led.2018.2811342
5) J. H. Ko, M. F. Amir, K. Z. Ahmed, T. Na, and S. Mukhopadhyay, "A Single-Chip Image Sensor Node with Energy Harvesting from a CMOS Pixel Array", IEEE Trans. Circuits Syst. I Regul. Pap., 2017. https://doi.org/10.1109/tcsi.2017.2703869
6) W. D. Leon-Salas, T. Fischer, X. Fan, G. Moayeri, and S. Luo, "A 64×64 image energy harvesting configurable image sensor", Proc. - IEEE Int. Symp. Circuits Syst., 2016. https://doi.org/10.1109/iscas.2016.7538947
7) N. Couniot, G. De Streel, F. Botman, A. K. Lusala, D. Flandre, and D. Bol, "A 65 nm 0.5 V DPS CMOS Image Sensor With for Ultra-Low-Power SoCs", IEEE J. Solid-State Circuits, 2015. https://doi.org/10.1109/jssc.2015.2457897
8) A. Y. C. Chiou and C. C. Hsieh, "A 137 dB Dynamic Range and 0.32 V Self-Powered CMOS Imager With Energy Harvesting Pixels", IEEE J. Solid-State Circuits, 2016. https://doi.org/10.1109/jssc.2016.2596765
9) F. Kaklin, J. M. Raynor, and R. K. Henderson, "High Voltage Generation Using Deep Trench Isolated Photodiodes in a Back Side Illuminated Process", 2018 IEEE Int. Electron Devices Meet., 2018. https://doi.org/10.1109/iedm.2018.8614656