WORKSHOP PAPER
A hybrid, back-illuminated image sensor for high QE visible and infrared detection
L. Pancheri et al., R. Turchetta1,2,3,4,5,6
1IMASENIC S.L., Pl. Tetuan 40-41, 08010 Barcelona, Spain
2SpaceASICS, Athens, Greece
3Alter, Madrid, Spain, and Livingston, UK
4TIFPA-INFN and University of Trento, Trento, Italy
5LFoundry s.r.l., Avezzano, Italy
6ESTEC, Nordvijk, The Netherlands
Abstract
For future space science and earth observation missions, there is a need for an image sensor with high quantum efficiency over a wide band, from visible to near infrared. A 1Megapixel, BSI hybrid image sensor comprising a detector and a CMOS readout integrated circuit (ROIC) is presented. The detector is fabricated with a thicker, back-side illuminated silicon die for improved QE in a wide band, and initial test results of the detector and ROIC are provided.
Keywords
hybrid image sensor,
quantum efficiency,
space science,
References