WORKSHOP PAPER
Fresnel Zone Plates: plasmonics filtering for SPADS sensors
Flavien HIRIGOYEN, PhD.1
1STMicroelectronics SA, Imaging Division, 12 rue Jules Horowitz B.P. 217 38019 Grenoble Cedex France

Abstract

It is proposed to present in this paper the integration of Fresnel Zone Plate (FZP) directly inside SPAD-based test chips in the context of advanced development of Time-Of-Flight sensors. The FZP dimensions and pitches have been estimated using FDTD modeling. We present here spectrum and angular selectivity achieved with such structures.
Publisher: IISS (Int. Image Sensors Society)
Year: 2017
Workshop: IISW
URL: https://doi.org/10.60928/h6ci-udut
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Keywords

Single Photon Avalanche Diode, Finite Difference Time Domain, Plasmonics, Fresnel Zone Plate, Time-Of-Flight,

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