WORKSHOP PAPER
Delta Doping Technology for Back Illuminated CMOS and CCD Imagers
Shouleh Nikzad1, Doug Bell2, Todd Veach, Jordana Blacksberg, Blake Jacquot, Bob Beach, Todd Jones, Michael Hoenk, Alex Carver, Frank Greer, Paul Maker, Steve Monacos, Erika Hamden
1Jet Propulsion Laboratory, California Institute of Technology,
2Advanced Detector Arrays and Nanoscience Technologies Group,

Abstract

The document discusses the development and advantages of delta doping technology for enhancing the performance of back-illuminated CMOS and CCD imagers. This technology allows for the achievement of high quantum efficiency, stability, and reproducibility in silicon-based detectors. It enables detectors to operate at their theoretical limits by facilitating full depletion, low dark current, and high quantum efficiency across a wide spectral range.
Publisher: California Institute of Technology
Year: 2009
Workshop: IISW
URL: https://doi.org/10.60928/hj0x-rd14
Download PDF

Keywords

Delta Doping, Back-Illuminated Imagers, Silicon Detectors,

References