WORKSHOP PAPER
Small Diameter SAG-based InGaAs/InP SPAD for 1550 nm photon counting
Abstract
In this work, we present an InGaAs/InP-based single-photon avalanche diode (SPAD) that has a 6 µm Zn diffusion diameter. However, the device can detect photons on a circular area with a ∼21 µm diameter, even though the Zn diffusion diameter is 6 µm. We investigated potential causes of this effect together with response areas of larger diameter SPADs of the same kind. The uniform efficiency response of the 6 µm diameter device makes it a good candidate for an array implementation with a 25 µm pixel pitch.Keywords
SPAD, InGaAs, InP, III/V, photon-counting, SWIR,References
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