WORKSHOP PAPER
A 5,000 fps, 4Megapixel, rad-tolerant, wafer-scale CMOS image sensors for the direct detection of electrons and photons
Abstract
This paper presents a 4.2Mpixel, high-speed, wafer-scale CMOS image sensors (CIS) for Cryo Electron Microscopy (Cryo-EM). The sensor is sensitive to electron as well as to light. The sensor achieves 5,266 frames per second at full resolution with 8-bit depth data. It also works with higher resolution of 9 or 10-bits, as well as with lower resolution of 4 or 6 bits. The speed varies with the bit depth, going from 3,300 fps at 10 bits, up to 7,267 fps at 4 bits. The detailed design and characterisation of the sensor are presented in this paper.Keywords
CMOS image sensors, Cryo Electron Microscopy, direct detection, electrons, photons,References
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