WORKSHOP PAPER
Charge domain type 2.2um BSI Global Shutter pixel with Dual Depth DTI
Abstract
We developed a 2.2µm Backside Illuminated (BSI) Global Shutter (GS) pixel with true charge-domain Correlated Double Sampling (CDS) and achieved a record-low GS read noise of 0.6e-. A thick-epi deep DTI (Deep Trench Isolation) process was implemented to enhance 1/PLS (Parasitic Light Sensitivity) using a dual-depth DTI structure. This newly developed pixel represents the smallest ever charge-domain GS pixel to date. Despite its compact size, it demonstrates exceptional performance by means of read noise level, Quantum Efficiency (QE), and 1/PLS.Keywords
Charge-domain, BSI, Global Shutter, Pixel, Dual Depth DTI,References
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