WORKSHOP PAPER
1.4 µm Pixel, 8 MP, > 5 µm epi , RGB -IR Image Sensor
Abstract
Image sensors with 1.4 µm pixel size, 8 MP array, stacked BSI, 65 nm technology have been fabricated with thick (>5 µm) epi silicon as a basic pre-requisite condition for increased near-infrared (NIR) response. Two backside surface processing variants were prepared and patterned with RGB-IR color filter array: one with NIR-enhancement inverted pyramids, and a baseline without NIR-enhancement features. An analysis is provided on the performance of these structural variants for RGB-IR imaging. Application-specific recommendations are made for the pixel variants developed.Keywords
Image Sensor, Near-Infrared Response, RGB-IR Imaging,References
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