WORKSHOP PAPER
Toward a Photon Counting Detector for X -ray Imaging by Direct Deposition of Scintillator on 32x32 CMOS SPAD Array
Yao-Lun Liu1, Meng-Hsuan Lu1, Chun-Hsien Liu1, Yu-Hsun Wu1, Sheng-Di Lin1, Chia-Ming Tsai1, Jin-Cherng Hsu2, Yu-Cheng Syu3, Jau-Yang Wu4
1Institute of Electronics, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu 300, Taiwan
2Graduate Institute of Applied Science and Engineering, Fu Jen Catholic University, New Taipei City 242062, Taiwan
3Department of Physics, Fu Jen Catholic University, New Taipei City 242062, Taiwan
4Department of Electrical Engineering, Yuan Ze University, Taoyuan 32003, Taiwan

Abstract

We develop a low cost and high performance X-ray imager by directly depositing the CsI material on the 32x32 CMOS single photon avalanche diode (SPAD) array as a scintillator. Our imager is more sensitive compared to a photomultiplier tube (PMT) with scintillator, commonly used in X-ray diffractometers (XRD), suggesting that the SPAD array imager with direct deposition of CsI could be a more suitable option for digital radiography systems.
Publisher: IISS (Int. Image Sensors Society)
Year: 2023
Workshop: IISW
URL: https://doi.org/10.60928/qq1x-2j8l
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Keywords

CMOS SPAD Array, X-ray Imaging, CsI Scintillator,

References

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