WORKSHOP PAPER
Tap mismatch mitigation of 3 µm 2 -tap pixels of indirect Time-of-Flight image sensor for high -speed depth mapping
Yuhi Yorikado1, Sozo Yokogawa1, Chihiro Okada1, Komomo Kodama1, Risa Iwashita1, Katsumi Honda1, Takahiro Hamasaki1, YukiHanabusa1, Shohei Yoshitsune2, Kei Nagoya2, Masatsugu Desaki2, Shota Hida2, Hayato Wakabayashi1, Fumihiko Koga1
1Sony Semiconductor Solutions Corporation, 4-14-1 Asahi-cho, Atsugi, Kanagawa, Japan
2Sony Semiconductor Manufacturing Corporation,

Abstract

This paper presents the development of a VGA-resolution stacked back-illuminated (BI) indirect time-of-flight (iToF) image sensor with 3.0 μm 2 -tap pixels. The sensor includes features such as a quantum efficiency (QE) of 38% at 940 nm, a full well capacity (FWC) of 37 ke-, demodulation contrast (Cmod) of 88% at 200 MHz, and parasitic light sensitivity (PLS) mismatch of less than -50 dB across the entire image area. A novel 2-frame sequence without anti-frames was found to maintain comparable depth noise performance with the 4-frame sequence in both indoor and outdoor conditions, making the sensor suitable for a variety of low-power, high depth frame rate 3D imaging applications.
Publisher: IISS (Int. Image Sensors Society)
Year: 2023
Workshop: IISW
URL: https://doi.org/10.60928/rkn8-ydjy
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Keywords

iToF image sensor, tap mismatch mitigation, 3D imaging,

References

1) M. S. Keel et al., JSSC 2020, 2020
2) M. S. Keel et al., ISSCC 2021, 2021
3) J. Kang et al., VLSI Symp. 2022, 2022
4) I. Oshiyama et al., IEDM 2017, 2017
5) C. Tubert et al, ESSCJRC 2021, 2021
6) Y. Ebiko et al., IEDM 2020, 2020
7) Y. Kwon et al., IEDM2020, 2020