WORKSHOP PAPER
High Throughput, High Yield Fabrication of High Quantum Efficiency Back-illuminated Photon Counting, Far UV, UV, and Visible Detector Arrays
Abstract
This paper discusses the high throughput end-to-end post fabrication processing of high performance delta-doped and superlattice-doped silicon imagers for UV, visible, and NIR applications, presenting results on far ultraviolet and ultraviolet quantum efficiency (QE) in a photon counting, detector array. Improvements in QE by nearly an order of magnitude over microchannel plates (MCPs) are achieved through precision interface band engineering of Molecular Beam Epitaxy (MBE) and Atomic Layer Deposition (ALD).Keywords
Quantum Efficiency, Photon Counting, Delta-doped,References
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