WORKSHOP PAPER
Microbolometer for high-end commercial and defense applications in 12 µm pitch
C.G.Jakobson1, U.Mizrahi, N.Ben Ari, N.Shiloah, E.Avnon, D.Seref, G.Zohar, R.Raichman, T.Markovitz
1SCD Semiconductor Devices, P.O. Box 2250, Haifa, 31021, Israel

Abstract

This work focuses on a novel 12 µm pitch, 640x512 VGA-format uncooled microbolometer targeted at commercial and defense applications. The microbolometer achieves 50mK NETD with a thermal time constant lower than 7msec providing an excellent figure of merit. The readout mode is based on a current-mode front end using thermally-shorted and mirror microbolometers that can be calibrated to overcome process fabrication non-uniformities.
Year: 2025
Workshop: IISW
URL: https://doi.org/10.60928/wz5k-732g
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Keywords

microbolometers, LWIR, uncooled, infrared, sensors, imaging,

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