WORKSHOP PAPER
10𝝁𝒎 Backside Illuminated SPAD cell with Novel Dielectric-Filled DTI Scheme for optical Isolation
Abstract
We present a 10.5µm back-side illuminated 3D-stacked single-photon avalanche diode (SPAD) sensor with reduced crosstalk and improved photon detection efficiency (PDE) performance. To minimize crosstalk, we employ an innovative double Deep Trench Isolation (DTI) solution. Enhanced PDE is achieved by optimizing the SPAD implant process to focus the generated carriers from the entire pixel volume into the high field avalanche region near the SPAD junction.Keywords
SPAD, Crosstalk, PDE, DTI,References
[1]) D. Bronzi, F. Villa, S. Tisa, A. Tosi, F. Zappa, "SPAD Figures of Merit for Photon-Counting, Photon-Timing, and Imaging Applications: A Review", IEEE Sensors Journal, 2016. https://doi.org/10.1109/jsen.2015.2483565
[2]) Y. Fujisaki, H. Tsugawa, K. Sakai, H. Kumagai, R. Nakamura, T. Ogita, "A back-illuminated 6 μm SPAD depth sensor with PDE 36.5% at 940 nm via combination of dual diffraction structure and 2×2 on-chip lens", Symposium on VLSI Technology, 2023. https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185251
[3]) E. Charbon, "SPAD Image Sensors for Quantum and Classical Imaging", STO Meetings proceedings, 2024
[4]) B. Mamdy, R. A. Bianchi, D. Golanski, B. Rae, T. M. Bah, D. Rideau, F. Twaddle, R. Helleboid, C. Buj, N. Moussy, R. Fillon, Y. Henrion, E. Lacombe, R. Neri, F. Brun, I. Nicholson, M. Agnew, B. Murray, M. Basset, R. Perrier, M. Al-Rawhani, S. Jouan, A. Lopez, L. Stark, S. Pellegrini, "A high PDE and high maximum count rate and low power consumption 3D-stacked SPAD device for Lidar applications", International Image Sensor Workshop, 2023
[5]) A. Abdelghafar, K. Morimoto, H. Sekine, H. Tsuchiya, M. Shinohara, Y. Ota, J. Iwata, Y. Matsuno, K. Sakurai, T. Ichikawa, "Light-Emission Crosstalk Model and Dynamic Correction Algorithm for Large-Scale SPAD Image Sensors", International Image Sensor Workshop, 2023