WORKSHOP PAPER
ORION sensor 10um 66Mpixel high dynamic range and sub-electron dark noise image sensor
Abstract
This paper presents a large scale 8k x 8k CMOS image sensor performing low noise and High Dynamic Range (HDR). The sensor embeds a 10 μm pixel with dual conversion gain featuring full well capacity (FWC) higher than 120 Ke- and sub-electron dark noise within the same image, providing > 100 dB dynamic range. The ORION sensor is back side illuminated allowing quantum efficiency (QE) greater than 90% with a dark current lower than 0.006 e/sec at -22 ⁰C. The device includes flexible operation modes enabling rolling shutter and global shutter, with different ADC resolutions to exchange noise performances and speed, being suitable for different low noise applications.Keywords
CMOS image sensor, HDR, dark current,References
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